Buffer-Free GeSn and SiGeSn Growth on Si Substrate Using In Situ SnD4 Gas Mixing

  • Aboozar Mosleh
  • , Murtadha Alher
  • , Larry C. Cousar
  • , Wei Du
  • , Seyed Amir Ghetmiri
  • , Sattar Al-Kabi
  • , Wei Dou
  • , Perry C. Grant
  • , Greg Sun
  • , Richard A. Soref
  • , Baohua Li
  • , Hameed A. Naseem
  • , Shui Qing Yu

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2051-2058
Number of pages8
JournalJournal of Electronic Materials
Volume45
Issue number4
DOIs
StatePublished - Apr 1 2016

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Chemical vapor deposition
  • GeSn alloy
  • photoluminescence
  • Si photonics
  • SiGeSn alloy

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