@inproceedings{2a4ace0e790f46d08e881d7133d92578,
title = "Development of SiGeSn technique towards mid-infrared devices in silicon photonics",
author = "W. Du and S. Al-Kabi and Ghetmiri, \{S. A.\} and H. Tran and T. Pham and B. Alharthi and A. Mosleh and J. Margetis and J. Tolle and Naseem, \{H. A.\} and M. Mortazavi and G. Sun and R. Soref and B. Li and Yu, \{S. Q.\}",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on SiGe, Ge, and Related Materials: Materials, Processing, and Devices 7 - PRiME 2016/230th ECS Meeting ; Conference date: 02-10-2016 Through 07-10-2016",
year = "2016",
doi = "10.1149/07508.0231ecst",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "8",
pages = "231--239",
editor = "J. Murota and B. Tillack and M. Caymax and G. Masini and Harame, \{D. L.\} and S. Miyazaki",
booktitle = "SiGe, Ge, and Related Materials",
edition = "8",
}