@inproceedings{8167fba6ad2a4f5eb1910535e0071e0b,
title = "Fabrication and characteristics of GaN/AlGaN multilayer structure for terahertz quantum-cascade laser",
keywords = "AlGaN, MOCVD, Quantum cascade laser, TEM, XRD",
author = "Wang, \{S. C.\} and Richard Soref and Greg Sun",
year = "2006",
doi = "10.1117/12.685678",
language = "English",
isbn = "0819464716",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Terahertz Physics, Devices, and Systems",
note = "Terahertz Physics, Devices, and Systems ; Conference date: 02-10-2006 Through 04-10-2006",
}