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Fano-resonance photonic crystal membrane reflectors at mid- and far-infrared

  • Yichen Shuai
  • , Deyin Zhao
  • , Gautam Medhi
  • , Robert Peale
  • , Zhenqiang Ma
  • , Walter Buchwald
  • , Richard Soref
  • , Weidong Zhou
  • University of Texas at Arlington
  • University of Central Florida
  • University of Wisconsin-Madison
  • University of Massachusetts Boston

Research output: Contribution to journal › Article › peer-review

Abstract

We report here single-layer ultracompact Fano-resonance photonic crystal membrane reflectors (MRs) at mid-infrared (IR) and far-IR (FIR) bands, based on single layer crystalline Si membranes. High-performance reflectors were designed for surfacenormal incidence illumination with center operation wavelengths up to the 75-μm FIR spectral band. Large-area patterned MRs were also fabricated and transferred onto glass substrates based on membrane transfer processes. Close to 100% reflection was obtained at the ~76-μm spectral band, with a single-layer Si membrane thickness of 18 μm. Such Fanoresonance-based membranes reflectors offer great opportunities for high-performance ultracompact dielectric reflectors at IR and THz regions.

Original languageEnglish
Article number6413161
JournalIEEE Photonics Journal
Volume5
Issue number1
DOIs
StatePublished - 2013

ASJC Scopus Subject Areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Keywords

  • Fano resonance
  • Infrared photonics
  • Membrane reflectors
  • Photonic crystals
  • Silicon photonics

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