Abstract
We report here single-layer ultracompact Fano-resonance photonic crystal membrane reflectors (MRs) at mid-infrared (IR) and far-IR (FIR) bands, based on single layer crystalline Si membranes. High-performance reflectors were designed for surfacenormal incidence illumination with center operation wavelengths up to the 75-μm FIR spectral band. Large-area patterned MRs were also fabricated and transferred onto glass substrates based on membrane transfer processes. Close to 100% reflection was obtained at the ~76-μm spectral band, with a single-layer Si membrane thickness of 18 μm. Such Fanoresonance-based membranes reflectors offer great opportunities for high-performance ultracompact dielectric reflectors at IR and THz regions.
| Original language | English |
|---|---|
| Article number | 6413161 |
| Journal | IEEE Photonics Journal |
| Volume | 5 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2013 |
ASJC Scopus Subject Areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
Keywords
- Fano resonance
- Infrared photonics
- Membrane reflectors
- Photonic crystals
- Silicon photonics
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