Hydrogen anneal of E′ centers in thermal SiO2 on Si

Zheng Li; S. J. Fonash; E. H. Poindexter; M. Harmatz; F. Rong; W. R. Buchwald

doi:10.1016/0022-3093(90)91036-Q

Hydrogen anneal of E′ centers in thermal SiO₂ on Si

Zheng Li
, S. J. Fonash
, E. H. Poindexter
, M. Harmatz
, F. Rong
, W. R. Buchwald

Engineering

Research output: Contribution to journal › Letter › peer-review

Original language	English
Pages (from-to)	173-176
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	126
Issue number	1-2
DOIs	https://doi.org/10.1016/0022-3093(90)91036-Q
State	Published - Dec 1 1990

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

Access to Document

10.1016/0022-3093(90)91036-Q

Cite this

@article{1c96dad044924a44946ab88a3e5e9280,

title = "Hydrogen anneal of E′ centers in thermal SiO2 on Si",

author = "Zheng Li and Fonash, \{S. J.\} and Poindexter, \{E. H.\} and M. Harmatz and F. Rong and Buchwald, \{W. R.\}",

year = "1990",

month = dec,

day = "1",

doi = "10.1016/0022-3093(90)91036-Q",

language = "English",

volume = "126",

pages = "173--176",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

number = "1-2",

}

TY - JOUR

T1 - Hydrogen anneal of E′ centers in thermal SiO2 on Si

AU - Li, Zheng

AU - Fonash, S. J.

AU - Poindexter, E. H.

AU - Harmatz, M.

AU - Rong, F.

AU - Buchwald, W. R.

PY - 1990/12/1

Y1 - 1990/12/1

UR - https://www.scopus.com/pages/publications/0025593990

UR - https://www.scopus.com/pages/publications/0025593990#tab=citedBy

U2 - 10.1016/0022-3093(90)91036-Q

DO - 10.1016/0022-3093(90)91036-Q

M3 - Letter

AN - SCOPUS:0025593990

SN - 0022-3093

VL - 126

SP - 173

EP - 176

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 1-2

ER -

Hydrogen anneal of E′ centers in thermal SiO₂ on Si

ASJC Scopus Subject Areas

Access to Document

Other files and links

Fingerprint

Cite this