| Original language | English |
|---|---|
| Pages (from-to) | 895-901 |
| Number of pages | 7 |
| Journal | ECS Transactions |
| Volume | 64 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2014 |
| Event | 6th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 2014 ECS and SMEQ Joint International Meeting - Cancun, Mexico Duration: Oct 5 2014 → Oct 9 2014 |
ASJC Scopus Subject Areas
- General Engineering