@inproceedings{8b1034a36c7349b08d295b608b653e77,
title = "Multi-layer far-infrared component technology",
abstract = "Multi-layer thin-film optics based on alternating sub-wavelength layers of silicon and air provide high index contrast to create improved components with just a few layers. Applications include ultra-high reflectivity mirrors, band-pass and band-blocking filters, anti-reflection coatings, and compact high-resolution Fabry-Perot spectrometers with broad freespectral- range. Such components may be integrated directly into airborne/satellite and man-portable sensing instrumentation. We demonstrate a process to produce ultrathin silicon optical elements with an integral raised spacer rim to provide the requisite air gap when these elements are combined directly into a Bragg stack. Laboratory measurements confirm theoretical design specifications. Individual elements may be stacked and bonded to form Bragg mirrors and other thin-film optics.",
keywords = "Bragg mirror, Far-infrared, silicon, Terahertz, thin-film optics",
author = "Peale, \{Robert E.\} and Cleary, \{Justin W.\} and Buchwald, \{Walter R.\} and Andrew Davis and Sandy Wentzel and Bill Stacy and Oliver Edwards",
year = "2010",
doi = "10.1117/12.861598",
language = "English",
isbn = "9780819483133",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Nanophotonics and Macrophotonics for Space Environments IV",
note = "Nanophotonics and Macrophotonics for Space Environments IV ; Conference date: 03-08-2010 Through 04-08-2010",
}