@article{54192e71c4984c7d9e913a976eafbce2,
title = "Observation of in-plane strain fluctuation in relaxed SiGe virtual substrate",
keywords = "Atomic force microscopy, Strain relaxation, UV-Raman, Virtual substrate",
author = "Huang, \{Wu Ping\} and Cheng, \{Henry H.\} and Gregory Sun and Lou, \{Rui Fa\} and Yeh, \{J. H.\} and Shen, \{Tzer Min\}",
year = "2008",
month = nov,
day = "3",
doi = "10.1016/j.tsf.2008.08.075",
language = "English",
volume = "517",
pages = "281--284",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "1",
}