Observation of in-plane strain fluctuation in relaxed SiGe virtual substrate

  • Wu Ping Huang
  • , Henry H. Cheng
  • , Gregory Sun
  • , Rui Fa Lou
  • , J. H. Yeh
  • , Tzer Min Shen

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)281-284
Number of pages4
JournalThin Solid Films
Volume517
Issue number1
DOIs
StatePublished - Nov 3 2008

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Keywords

  • Atomic force microscopy
  • Strain relaxation
  • UV-Raman
  • Virtual substrate

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