Optical and electrical studies of interface traps in the Si/SiO2 system by modified junction space-charge techniques

H. G. Grimmeiss; W. R. Buchwald; E. H. Poindexter; P. J. Caplan; M. Harmatz; G. J. Gerardi; D. J. Keeble; N. M. Johnson

doi:10.1103/PhysRevB.39.5175

Optical and electrical studies of interface traps in the Si/SiO2 system by modified junction space-charge techniques

H. G. Grimmeiss
, W. R. Buchwald
, E. H. Poindexter
, P. J. Caplan
, M. Harmatz
, G. J. Gerardi
, D. J. Keeble
, N. M. Johnson

Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	5175-5185
Number of pages	11
Journal	Physical Review B
Volume	39
Issue number	8
DOIs	https://doi.org/10.1103/PhysRevB.39.5175
State	Published - 1989

ASJC Scopus Subject Areas

Condensed Matter Physics

Access to Document

10.1103/PhysRevB.39.5175

Cite this

@article{9420100d20ad4cddb3092ad30847cd53,

title = "Optical and electrical studies of interface traps in the Si/SiO2 system by modified junction space-charge techniques",

author = "Grimmeiss, \{H. G.\} and Buchwald, \{W. R.\} and Poindexter, \{E. H.\} and Caplan, \{P. J.\} and M. Harmatz and Gerardi, \{G. J.\} and Keeble, \{D. J.\} and Johnson, \{N. M.\}",

year = "1989",

doi = "10.1103/PhysRevB.39.5175",

language = "English",

volume = "39",

pages = "5175--5185",

journal = "Physical Review B",

issn = "0163-1829",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Optical and electrical studies of interface traps in the Si/SiO2 system by modified junction space-charge techniques

AU - Grimmeiss, H. G.

AU - Buchwald, W. R.

AU - Poindexter, E. H.

AU - Caplan, P. J.

AU - Harmatz, M.

AU - Gerardi, G. J.

AU - Keeble, D. J.

AU - Johnson, N. M.

PY - 1989

Y1 - 1989

UR - https://www.scopus.com/pages/publications/0343783408

UR - https://www.scopus.com/pages/publications/0343783408#tab=citedBy

U2 - 10.1103/PhysRevB.39.5175

DO - 10.1103/PhysRevB.39.5175

M3 - Article

AN - SCOPUS:0343783408

SN - 0163-1829

VL - 39

SP - 5175

EP - 5185

JO - Physical Review B

JF - Physical Review B

IS - 8

ER -

Optical and electrical studies of interface traps in the Si/SiO2 system by modified junction space-charge techniques

ASJC Scopus Subject Areas

Access to Document

Other files and links

Fingerprint

Cite this