rf plasma oxidation of Ni thin films sputter deposited to generate thin nickel oxide layers

  • Megan L. Hoey
  • , J. B. Carlson
  • , R. M.O. Osgood
  • , B. Kimball
  • , W. Buchwald

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1064-1067
Number of pages4
JournalIEEE Transactions on Information Theory
Volume39
Issue number3
DOIs
StatePublished - 1993

ASJC Scopus Subject Areas

  • Information Systems
  • Computer Science Applications
  • Library and Information Sciences

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