| Original language | English |
|---|---|
| Pages (from-to) | 51-56 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 23 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2005 |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Fingerprint
Dive into the research topics of 'Sidewall profile control of thick benzocyclobutene reactively ion etched in CF4 O2 plasmas'. Together they form a unique fingerprint.Cite this
- APA
- Standard
- Harvard
- Vancouver
- Author
- BIBTEX
- RIS