SiyGe1-x-ySnx films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system

Aboozar Mosleh; Murtadha Alher; Wei Du; Larry C. Cousar; Seyed Amir Ghetmiri; Sattar Al-Kabi; Wei Dou; Perry C. Grant; Greg Sun; Richard A. Soref; Baohua Li; Hameed A. Naseem; Shui Qing Yu

doi:10.1116/1.4936892

Si_yGe_1-x-ySn_x films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system

Aboozar Mosleh
, Murtadha Alher
, Wei Du
, Larry C. Cousar
, Seyed Amir Ghetmiri
, Sattar Al-Kabi
, Wei Dou
, Perry C. Grant
, Greg Sun
, Richard A. Soref
, Baohua Li
, Hameed A. Naseem
, Shui Qing Yu

Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	011201
Journal	Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume	34
Issue number	1
DOIs	https://doi.org/10.1116/1.4936892
State	Published - Jan 1 2016

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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Mosleh, A., Alher, M., Du, W., Cousar, L. C., Ghetmiri, S. A., Al-Kabi, S., Dou, W., Grant, P. C., Sun, G., Soref, R. A., Li, B., Naseem, H. A., & Yu, S. Q. (2016). Si_yGe_1-x-ySn_x films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 34(1), Article 011201. https://doi.org/10.1116/1.4936892

Mosleh, A, Alher, M, Du, W, Cousar, LC, Ghetmiri, SA, Al-Kabi, S, Dou, W, Grant, PC, Sun, G, Soref, RA, Li, B, Naseem, HA & Yu, SQ 2016, 'Si_yGe_1-x-ySn_x films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system', Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, vol. 34, no. 1, 011201. https://doi.org/10.1116/1.4936892

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author = "Aboozar Mosleh and Murtadha Alher and Wei Du and Cousar, \{Larry C.\} and Ghetmiri, \{Seyed Amir\} and Sattar Al-Kabi and Wei Dou and Grant, \{Perry C.\} and Greg Sun and Soref, \{Richard A.\} and Baohua Li and Naseem, \{Hameed A.\} and Yu, \{Shui Qing\}",

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T1 - SiyGe1-x-ySnx films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system

AU - Mosleh, Aboozar

AU - Alher, Murtadha

AU - Du, Wei

AU - Cousar, Larry C.

AU - Ghetmiri, Seyed Amir

AU - Al-Kabi, Sattar

AU - Dou, Wei

AU - Grant, Perry C.

AU - Sun, Greg

AU - Soref, Richard A.

AU - Li, Baohua

AU - Naseem, Hameed A.

AU - Yu, Shui Qing

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JO - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

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ER -

Si_yGe_1-x-ySn_x films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system

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