Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process

Aboozar Mosleh; Seyed Amir Ghetmiri; Benjamin R. Conley; Wei Du; Shui Qing Yu; Hameed Naseem; Richard A. Soref; Greg Sun; John Tolle; Joe Margetis

doi:10.1109/SUM.2014.117

Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process

Aboozar Mosleh
, Seyed Amir Ghetmiri
, Benjamin R. Conley
, Wei Du
, Shui Qing Yu
, Hameed Naseem
, Richard A. Soref
, Greg Sun
, John Tolle
, Joe Margetis

Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	221-222
Number of pages	2
ISBN (Electronic)	9781479927678
DOIs	https://doi.org/10.1109/SUM.2014.117
State	Published - Sep 18 2014
Event	2014 Summer Topicals Meeting Series, SUM 2014 - Montreal, Canada Duration: Jul 14 2014 → Jul 16 2014

Publication series

Name	Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014

Conference

Conference	2014 Summer Topicals Meeting Series, SUM 2014
Country/Territory	Canada
City	Montreal
Period	7/14/14 → 7/16/14

ASJC Scopus Subject Areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Signal Processing

Keywords

compressively strained films
germanium
germanium alloys
tin alloys

Access to Document

10.1109/SUM.2014.117

Cite this

Mosleh, A., Ghetmiri, S. A., Conley, B. R., Du, W., Yu, S. Q., Naseem, H., Soref, R. A., Sun, G., Tolle, J., & Margetis, J. (2014). Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process. In Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014 (pp. 221-222). Article 6903066 (Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SUM.2014.117

Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process. / Mosleh, Aboozar; Ghetmiri, Seyed Amir; Conley, Benjamin R. et al.
Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 221-222 6903066 (Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mosleh, A, Ghetmiri, SA, Conley, BR, Du, W, Yu, SQ, Naseem, H, Soref, RA, Sun, G, Tolle, J & Margetis, J 2014, Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process. in Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014., 6903066, Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014, Institute of Electrical and Electronics Engineers Inc., pp. 221-222, 2014 Summer Topicals Meeting Series, SUM 2014, Montreal, Canada, 7/14/14. https://doi.org/10.1109/SUM.2014.117

Mosleh A, Ghetmiri SA, Conley BR, Du W, Yu SQ, Naseem H et al. Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process. In Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 221-222. 6903066. (Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014). doi: 10.1109/SUM.2014.117

Mosleh, Aboozar ; Ghetmiri, Seyed Amir ; Conley, Benjamin R. et al. / Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process. Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 221-222 (Proceedings - 2014 Summer Topicals Meeting Series, SUM 2014).

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title = "Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process",

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author = "Aboozar Mosleh and Ghetmiri, \{Seyed Amir\} and Conley, \{Benjamin R.\} and Wei Du and Yu, \{Shui Qing\} and Hameed Naseem and Soref, \{Richard A.\} and Greg Sun and John Tolle and Joe Margetis",

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AU - Mosleh, Aboozar

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AU - Conley, Benjamin R.

AU - Du, Wei

AU - Yu, Shui Qing

AU - Naseem, Hameed

AU - Soref, Richard A.

AU - Sun, Greg

AU - Tolle, John

AU - Margetis, Joe

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KW - germanium alloys

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PB - Institute of Electrical and Electronics Engineers Inc.

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Strain relaxation and material quality improvement of compressively strained GeSn epitaxial films through a cyclic rapid thermal annealing process

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Conference

ASJC Scopus Subject Areas

Keywords

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