@article{68bf359b0e784f4384095965336f722d,
title = "Surface chemistry of alkylsilanes on Si(1000)2 × 1",
keywords = "Alkylsilanes, Chemical vapor deposition, Electron energy loss spectroscopy, Silicon, Single crystal epitaxy, Surface chemical reaction, Thermal desorption spectroscopy, Vibrations of adsorbed molecules",
author = "Michelle Foster and Bill Darlington and Jason Scharff and Alan Campion",
year = "1997",
month = mar,
day = "20",
doi = "10.1016/S0039-6028(96)01260-5",
language = "English",
volume = "375",
pages = "35--44",
journal = "Surface Science",
issn = "0039-6028",
publisher = "Elsevier B.V.",
number = "1",
}